Substrate processing system, substrate processing method and storage medium

ABSTRACT

[Object]To provide a technique capable of avoiding or reducing the adverse influence on the equipment of an atmospheric carrying chamber when a substrate processed by the vacuum process is carried to the atmospheric carrying chamber. [Means for Solving the Problems]In the present invention, a posttreatment chamber for carrying out a posttreatment in an atmospheric atmosphere adjoins a load-lock chamber. Products produced on a substrate are removed by processing the substrate in the posttreatment chamber before the substrate is carried to an atmospheric carrying chamber. A carrying means installed in the said atmospheric carrying chamber caries the substrate to and from the said posttreatment chamber. The said posttreatment chamber and the atmospheric carrying chamber are separated from each other by a partition wall, and the partition wall is provided with an opening having the shape of a slit through which the said carrying means and the substrate can pass. The said carrying means carries the substrate into and out of the posttreatment chamber through the slit.

FIELD OF THE INVENTION

The present invention relates to the field of techniques for avoiding or reducing the adverse influence of a product formed on a substrate by a vacuum process and exposed to the atmosphere on the inside of an atmospheric carrying chamber when the substrate processed by the vacuum process is carried to the atmospheric carrying chamber.

BACKGROUND ART

A substrate to be processed, such as a semiconductor wafer (hereinafter, referred to simply as “wafer”), is subjected to a vacuum process, such as a plasma processing process, for example, an etching process, to fabricate semiconductor devices. A vacuum processing system called a multichamber system is used to carry out such a process at a high throughput.

There is a known vacuum processing system provided with a vacuum processing chamber and an atmospheric carrying chamber by way of example. Referring to FIG. 11, this example includes FOUP (Front Opening Unified Pod) tables 10 for supporting thereon a FOUP, namely, a carrying container containing a plurality of wafers, for example twenty-five wafers, a transfer module (TM) 11 provided with a carrying arm for carrying a wafer and maintaining a vacuum atmosphere, four process modules (PM) 12 a, 12 b, 12 c and 12 d for processing a wafer by predetermined processes in a vacuum atmosphere, a loader module (LM) 14 provided with a carrying mechanism including a carrying arm for carrying a wafer and maintained in an atmospheric atmosphere, two load-lock modules (LLM) 15 a and 15 b disposed between the said loader module 14 and the said transfer module 11, and capable of being selectively set in either of a vacuum atmosphere and a normal-pressure atmosphere, and an orienter (ORT), not shown, disposed so as to adjoin the said loader module 14 for the prealignment of a wafer. In FIG. 11, indicated at G11 to G14 are gate valves.

A wafer carrying route in the said vacuum processing system will be briefly described. A wafer to be processed, which is supported on the FOUP table 10, is carried along a carrying route passing the LM, the ORT, the LLM, the TM and the PM in that order. The wafer is processed by, for example, an etching process in the process module 12 a (12 b, 12 c, 12 d) in a predetermined atmosphere of a process gas. Then, the wafer thus processed is carried along a carrying route passing the TM, the LLM and LM in that order and is returned to the FOUP table 10.

In some cases, gases generated by the reaction of byproducts produced on the wafer during processing the wafer with moisture contained in the atmosphere condense on wafers not yet processed during the operation for returning the processed wafer to the FOUP table 10, and the liquids thus produced can cause defects in devices. A purge storage 13 (indicated by broken lines) is connected to the said loader module 14, in which the processed wafer is held temporarily to prevent such cross-contamination.

However, the following problem arises when the processed wafer is carried from the load-lock module 15 a (15 b) through the loader module 14 to the purge storage 13. For example, a process gas, such as HBr gas or Cl₂ gas, is ionized in the process module 12 a (12 b, 12 c, 12 d) to generate plasma for etching a polysilicon film formed on a wafer by an etching process. During the etching process, a byproduct, such as silicon bromide or silicon chloride, is produced on the wafer. When the wafer is carried into the loader module 14 in the atmospheric atmosphere, for example, the silicon bromide or the silicon chloride react with moisture contained in the atmosphere and, consequently, a corrosive gas, such as hydrogen bromide gas or hydrogen chloride gas, is produced. The corrosive gas reacts with a small amount of ammonia contained in the atmosphere to produce ammonium bromide or ammonium chloride particles, and the particles diffuse in the loader module 14. Consequently, metal parts of the loader module 14, such as walls defining a carrying chamber, and the carrying mechanism, are corroded, and the corroded parts are possibly abraded during, for example, mechanical motions and cause metal contamination. It is also feared that the particles adhere to the internal parts of the loader module 14 and cause particle contamination.

On the other hand, it is mentioned in patent document 1 that entrained contaminants adhered to a sample in a plasma-processing system react with moisture contained in the atmosphere to produce new contaminants or to create an environment that corrodes structural members. There, after the said sample is carried into or out of an evacuated load-lock chamber in a state where a gas is supplied through a gas inlet port into the said load-lock chamber, a gate valve on the side of the atmosphere is opened, the gas is supplied continuously into the load-lock chamber, a gas is supplied through the gas inlet port formed in a cover, and an atmosphere in the cover is discharged through an exhaust port formed in the cover. However, even if currents are generated in the load-lock chamber to remove contaminants adhering to a wafer, the contaminants cannot be removed by the currents in a short time because the wafer can be held in the load-lock chamber only for a short time in consideration of throughput, so this method cannot be adopted to an actual product.

[Patent document 1] JP-A2005-50852

DISCLOSURE OF THE INVENTION

[Problems to be Solved by the Invention]

The present invention has been made in view of such problems and it is therefore an object thereof to provide techniques capable of avoiding or reducing the adverse influence on the equipment on the side of an atmospheric carrying chamber when the substrate processed in the vacuum processing chamber is carried to the atmospheric carrying chamber.

[Means to Solve the Problems]

A substrate processing system according to the present invention comprises: a carrier table for supporting thereon a substrate carrier containing a plurality of substrates;

a vacuum processing chamber in which the said substrate is processed in a vacuum atmosphere;

a load-lock chamber, through which the substrate is sent out to and received from the vacuum processing chamber, capable of being selectively set in either of a vacuum atmosphere and a normal-pressure atmosphere;

a posttreatment chamber adjoining the load-lock chamber to post-process in an atmospheric atmosphere the processed substrate processed by a vacuum process to remove products produced on the substrate by the process; and

an atmospheric carrying chamber interposed between the said load-lock chamber and the said carrier table and provided with a carrying means for carrying a substrate in an atmospheric atmosphere.

Preferably, a substrate is carried into and out of the said posttreatment chamber by the carrying means installed in the said atmospheric carrying chamber. More preferably, the following constitution is employed.

(1) The said posttreatment chamber and the atmospheric carrying chamber are separated from each other by a partition wall, and the partition wall is provided with an opening having the shape of a slit so that the said carrying means and a substrate can pass.

(2) A gate valve disposed between the said atmospheric carrying chamber and the load-lock chamber serves also as a gate valve between the load-lock chamber and the posttreatment chamber

(3) The said load-lock chamber is provided with a gateway bent with respect to a longitudinal direction, and the said gate valve has a valve element bent so as to conform to the gateway.

A condition expressed by the above-mentioned word “bent” is either of a condition where a structure is bent in the shape of a chevron and a condition where a structure is bent in the shape of a circular arc (curved).

Further, preferably, the said load-lock chamber used in the present invention includes a first load-lock chamber and a second load-lock chamber disposed symmetrically behind the atmospheric carrying chamber, and the said posttreatment chamber is disposed between the said first and second load-lock chambers. In addition, the posttreatment chamber may be provided with, for example, a holding unit capable of holding substrates in a plurality of layers. In this case, preferably, the holding unit of the posttreatment chamber can be vertically moved by a lifting means. The posttreatment chamber is used for promoting the reaction of products formed on a substrate while the substrate is being processed with moisture contained in the atmosphere.

A substrate processing method according to the present invention comprises the steps of: processing a substrate in a vacuum processing chamber;

carrying the processed substrate from the said vacuum processing chamber to a load-lock chamber;

changing a vacuum atmosphere in the load-lock chamber for a normal-pressure atmosphere;

subsequently carrying the said substrate from the said load-lock chamber to a posttreatment chamber adjoining the said load-lock chamber;

processing the said substrate by a posttreatment in an atmospheric atmosphere to remove products produced by a vacuum process in the said posttreatment chamber; and

carrying the substrate from the posttreatment chamber to an atmospheric carrying chamber disposed between a carrier table on which a carrying container containing a plurality of substrates is placed and the said load-lock chamber, and provided with a carrying means for carrying the substrate in an atmospheric atmosphere.

The other invention is a storage medium storing a computer program to be executed by a substrate processing system for processing a substrate in a vacuum atmosphere;

wherein the said program specifies the steps of a substrate processing method according to the present invention.

EFFECTS OF THE INVENTION

According to the present invention, the products produced on the substrate by the vacuum process are removed in the posttreatment chamber adjoining the load-lock chamber before the substrate is carried to the atmospheric carrying chamber. Therefore, adverse effects of the products on the components of the atmospheric carrying chamber (the walls of the atmospheric carrying chamber and a carrying mechanism) installed in the atmospheric carrying chamber, can be prevented or reduced. The posttreatment chamber does not need to be provided with a special carrying means when the carrying means installed in the said atmospheric carrying camber is used for carrying a substrate into and out of the posttreatment chamber. Thus, the system can be built in a simple construction and at a low cost. A substrate can be efficiently carried when the common gate valve is used to separate the atmospheric carrying chamber and the load-lock chamber from each other, and the load-lock chamber and the posttreatment chamber from each other.

[Best Mode to Carry Out the Invention]

An embodiment of the substrate processing system according to the present invention will be described. FIG. 1 is a schematic plan view of the substrate processing system in this embodiment, and FIG. 2 is a schematic perspective view of an important part of the substrate processing system. Referring to FIG. 1, numeral 2 is the substrate processing system carrying semiconductor wafers (hereinafter, referred to simply as “wafers”) W, namely, substrates to be processed, one by one and processing the wafers W by a predetermined process. The substrate processing system 2 includes a transfer module (TM) 20 having a longitudinally elongate hexagonal shape, two process modules (PM) 30 a and 30 b disposed near one longitudinal side surface of the said transfer module 20 (extending in the Y-axis direction in FIG. 1), two process modules 30 c and 30 d disposed near the other longitudinal side surface of the said transfer module 20 (extending in the Y-axis direction in FIG. 1), two load-lock modules (LLM) 40 a and 40 b connected to one oblique end surface (in the X-axis direction in FIG. 1) of the said transfer module 20, and a loader module 50 extending beside the said load-lock module 40 a and the said load-lock module 40 b. The said load-lock module 40 a corresponds to a first load-lock chamber and the said load-lock module 40 b corresponds to a second load-lock chamber, respectively.

The said process modules 30 a to 30 d are provided with wafer stages 31 a to 31 d for supporting a wafer in a vacuum processing chamber, electrodes for generating plasma, and process gas supply systems for supplying a process gas, such as hydrogen bromide (HBr) gas into the vacuum processing chambers, respectively. I-ugh-frequency power is applied to the electrodes to generate plasma by ionizing the process gas. An etching process etches, for example, a polysilicon film formed on a wafer W by using the plasma.

Gate valves G1, G2, G3 and G4 are disposed at the joints of the said transfer module 20 and the said process modules 30 a to 30 d, respectively. The said transfer module 20 is provided with a carrying arm unit 21 installed in a vacuum carrying chamber and including two scalar arm type carrying arms. The said carrying arm unit 21 moves along guide rails 22 extended longitudinally (extending in the Y-axis direction in FIG. 1) in the transfer module 20 to carry a wafer W to and from the respective process modules 30 a to 30 d and the load-lock modules 40 a and 40 b.

The said loader module 50 has the shape of a transversely elongate box. As shown in FIG. 3, a fan filter unit (FFU) 55 formed by combining a fan and a filter is attached to the top wall of the loader module. An exhaust fan unit 56 is combined with the floor of the loader module. The said exhaust fan unit 56 is connected to a plant exhaust system provided with a detoxification unit. A downward stream of clean air is produced between the FFU 55 and the exhaust fan unit 56. Further, the rear wall 57 of the said loader module 50 is provided with an opening 53 having the shape of a slit.

In addition, a carrying arm mechanism 51 is installed inside the said loader module 50. As shown in FIG. 2, three openings 51 a, 51 b and 51 c are formed as openings for carrying wafers W in the front wall of the loader module facing FOUP tables 70 that will be described later. The said carrying arm mechanism 51 includes an X-axis moving member electromagnetically driven for reciprocation along a guide rail 52 transversely extended in the loader module 50, a horizontal swivel table supported for turning in a horizontal plane by a Z-axis lifting mechanism on the said X-axis moving member, and an articulated carrying arm 54 mounted on the said swivel table and capable of extending in radial directions or horizontal directions. The carrying arm 54 has, for example, a fork-shaped holding part as shown in FIG. 2 so that a peripheral part of the lower surface of the wafer W is seated on the holding part.

The said load-lock modules 40 a and 40 b are disposed symmetrically between the rear wall of the loader module 50 and the transfer module 20. Gate valves G5 and G6 are disposed at the joints of the said load-lock modules 40 a and 40 b and the said transfer module 20, respectively. The said load-lock modules 40 a and 40 b are provided with wafer stages 41 a and 41 b for supporting a wafer W thereon. The internal spaces of the said load-lock modules 40 a and 40 b can be selectively set in a predetermined vacuum atmosphere and normal-pressure atmosphere of, for example, nitrogen gas.

The said load-lock modules 40 a and 40 b have a pentagonal cross-sectional shape. An opening 42 a (42 b) through which a wafer W, described later, is carried into and out of the modules is formed in a sidewall of the load-lock module 40 a facing that of the load-lock module 40 b. Gate valves G7 and G8 for opening and closing the openings 42 a (42 b) are installed respectively. In other words, as shown in FIGS. 1 and 2, each of the gate valves G7 and G8 is bent, for example, in the shape of a chevron so as to extend along the two adjacent sides of the pentagonal cross-sectional shape, and the gate valves separate the respective interiors of the load-lock modules 40 a (40 b) from the loader module 50 and a purge storage (PST) 60 to be mentioned later. Further, the said gate valves G7 and G8 also function as gate valves between the load-lock modules 40 a (40 b) and the purge storage (PST)60 to be described later. The construction and operation of the gate valves G7 and G8 will be described later.

Furthermore, in the said substrate processing system 2, the rear wall 57 of the loader module 50, the two sides of the respective load-lock modules 40 a and 40 b, and one side of the transfer module 20 define a body of a processing chamber of the purge storage 60, namely, a posttreatment chamber. The purge storage 60 is installed to convert products produced by a plasma processing process, namely, a vacuum process, and capable of changing into a substance detrimental to the equipment of the loader module 50 when exposed to an atmospheric atmosphere into a corrosive gas by reacting the products with moisture contained in the atmosphere and to dissipate the corrosive gas (posttreatment).

Referring to FIGS. 2 and 3, a substrate holding device 63 is disposed in the said purge storage 60, which can hold a plurality of wafers, four wafers W in this embodiment, in layers. The substrate holding device 63 includes a base 64 set on the bottom wall, a post 65 set upright at one end of the base 64, a plurality of support arms 66, four in this embodiment, at a predetermined interval on the upper end side of the said post 65, and a lifting mechanism 67 for vertically moving the said post 65. Further, as shown in FIG. 2 by way of example, the said support arms 66 are formed in a U-shape so that the said carrying arm 54 can enter a central space 66 a. The said lifting mechanism 67 can position one support arm 66 selected from the four support arms 66 at a position corresponding to a transfer level where the carrying arm 54 can transfer a wafer to the selected one of the arms.

Further, an exhaust pipe 68 is connected to the bottom wall of the said purge storage 60, and the lower end of the said exhaust pipe 68 is connected to a plant exhaust system provided with a detoxification unit. Thus, clean air flowed from the loader module 50 through the slit-shaped opening 53 into the said purge storage 60 is discharged through the exhaust pipe 68 into the plant exhaust system.

Moreover, FOUP tables 70 a to 70 c are disposed on the side of the front wall of the said loader module 50 respectively for placing FOUPs (front opening unified pods), namely, wafer carriers, each containing a plurality of, for example twenty-five wafers W and carrying through the above-mentioned openings 51 a to 51 c. An orienter (ORT) 71 adjoins the left wall, as viewed in FIG. 1, of the said loader module 50 and aligns beforehand a position of the wafer W carried from the FOUP tables 70 a to 70 c into the loader module 50.

Here, the gate valves G7 and G8 linked with the walls of the load-lock modules 40 a and 40 b, respectively, will be described. Referring to FIG. 4, the gate valve G7 and G8 include a chevron-shaped valve element 80, a valve stem 81 supporting the said valve element 80, and a valve element moving mechanism 82 connected to the said lower end of the valve stem 81 and placed at the bottom wall of the purge storage 60. An 0 ring 83, namely, a resin ring-shaped member, is attached to the inner surface of the said valve element 80 to seal the wall of the load-lock modules 40 a and 40 b and the valve element 80 as closely as possible. To open and close the gate valve G7 (G8), first the valve element driving mechanism 82 raises the valve element 80 to a position at a predetermined height as shown in FIG. 5 (refer to FIG. 5(a)). Subsequently, the valve element driving mechanism 82 tilts the valve elements 80 to press the elements against the sidewalls of the load-lock modules 40 a and 40 b so as to close the horizontally elongate opening 42 a (42 b) in an airtight fashion (refer to FIG. 5(b)). To open the gate valve G7 (G8), the foregoing closing procedure is reversed.

Further, a gate valve G7 (G8) shown in FIG. 6 may be used. When this example is used, sealing surfaces facing down are formed along edges of the opening 42 a (42 b) of the load-lock module 40 a (40 b), and sealing surfaces facing up are formed in the gate valve G7 (G8), and these surfaces are brought into close contact vertically. In other words, as shown in FIG. 7, the load-lock module 40 a (40 b) is provided with a lower sealing surface 95 facing down and extending along the lower edge of the said opening 42 a (42 b) on the inner side thereof, a sealing surface 94 facing down and extending along the upper edge of the said opening 42 a (42 b) on the outer side thereof, and sealing surfaces (not shown in FIG. 7) facing down and extending along the side edges of the opening 42 a (42 b). On the other hand, the valve element 90 is provided with sealing surfaces 91 and 92 facing up, extending along the upper and lower edges of valve element 90, respectively, and corresponding to the said sealing surfaces 94 and 95 facing down, respectively, and further sealing surfaces 97 facing up and extending between the sealing surfaces 91 and 92. In addition, an O ring 93, namely, a resin ring-shaped member, is attached to the sealing surfaces 91, 92 and 97. Moreover, the valve element 90 is raised to bring the sealing surfaces 91, 92 and 97 facing up of the valve element 90 side into close contact with the sealing surfaces 94 and 95 facing down of the opening 42 a (42 b) as shown in FIG. 7. Thus, the horizontally elongate opening 42 a (42 b) formed in the walls of the load-lock modules 40 a and 40 b is closed in an airtight fashion (refer to FIG. 7(b)).

Moreover, the said substrate processing system 2 is provided with a controller 100. For example, the said controller 100 is a computer and executes control operations according to a computer program to control the sequential operations of the carrying arm unit 21, the carrying arm mechanism 51, the lifting mechanism 67 and the gate valves G1 to G8, and sequential steps of vacuum processes to be executed by the process modules 30 a to 30 d. Further, the program is stored in a storage medium, such as a hard disk, a flexible disk, a compact disk, a magnetooptical disk (MO) or a memory card, and is downloaded from the storage medium into the controller 100.

Next, an operation of the above-mentioned substrate processing system 2 will be described. First, a FOUP containing wafers W is placed on, for example, the FOUP table 70 a, and the lid of the FOUP is removed. Then, the carrying arm 54 takes out a wafer W to be processed and brings the wafer through the opening 51 a into the loader module (LM) 50. The wafer W to be processed is transferred to the orienter (ORT) 71 through the loader module 50. The said orienter(ORT) 71 aligns a position the wafer W. Subsequently, the said wafer W carried out of the orienter 71 by the carrying arm 54 is carried to the load-lock module(LLM) 40 a through the loader module (LM) 50.

Here, a carrying procedure for carrying the wafer W to be processed from the loader module (LM) 50 to the load-lock module (LLM) 40 a by the carrying arm 54 will be described with reference to FIG. 8. First, the carrying arm mechanism 51 is positioned in front of, for example, the load-lock module (LLM) 40 a as shown in FIG. 8(a). Then, the carrying arm 54 is stretched out to advance the said carrying arm 54 through the opening 42 a formed in the wall of the load-lock module 40 a into the load-lock module (LLM) 40 a (refer to FIG. 8(b)). Further, in FIG. 8, the wafer W supported on the carrying arm 54 is indicated by a chain line for the convenience of explanation.

Subsequently, the carrying arm unit 21 picks up the wafer W to be processed, which is placed on the wafer stage 41 a of the load-lock module (LLM) 40 a, and carries the wafer into the transfer module (TM) 20. Then, the wafer W to be processed is carried in the transfer module (TM) 20 to, for example, the process module (PM) 30 a, and the process module (PM) 30 a processes the wafer by a plasma processing process, such as an etching process.

After the processing, the carrying arm unit 21 picks up the processed wafer W from the process module (PM) 30 a, and the said wafer W is carried through the transfer module (TIM) 20 to the load-lock module (LLM) 40 a. Subsequently, a vent valve, not shown, is opened and, for example, nitrogen gas is supplied from an inert gas source, not shown, into the load-lock module (LLM) 40 a to change a vacuum atmosphere in the load-lock module (LLM) 40 a for a normal-pressure atmosphere. Then, the gate valve G7 is opened, and the carrying arm 54 carries the processed wafer W from the load-lock module (LLM) 40 a to the purge storage (PST) 60.

A procedure for carrying the processed wafer W by the carrying arm 54 from the load-lock module (LLM) 40 a to the purge storage (PST) 60 will be described with reference to FIG. 9. For example, the carrying arm mechanism 51 is positioned in front of the load-lock module (LLM) 40 a, the carrying arm 54 is stretched out to be advanced through the slit-shaped opening 53 formed in the rear partition wall 57 of the loader module (LM) 50 into the load-lock module (LLM) 40 a. The wafer W is lifted up from the wafer stage 41 a by lifting pins, not shown, the carrying arm 54 is raised from the wafer W to transfer the wafer W to the said carrying arm 54. Then, the carrying arm 54 is retracted to take out the wafer W, the carrying arm 54 is turned clockwise through a small angle, the carrying arm 54 is moved along the X-axis such that the holding part of the said carrying arm 54 is positioned in a region extending over a space surrounded by the U-shaped support arm 66 of the substrate holding device 63. Subsequently, the support arms 66 are raised with a peripheral part of the wafer W on the carrying arm 54 being supported. The carrying arm 54 is retracted to a position in front of the support arms 66. Then, the support arms 66 are moved vertically and the carrying arm is stretched out again to receive a processed wafer W supported on another support arm of the substrate holding device 63. In addition, the carrying arm 54 is formed in a transverse width a little smaller than the transverse width of a space 66 a surrounded by the U-shaped support arm 66 to prevent the support arm 54 from interfering with the support arm 66 in a plane. In this case, the support arms 66 are moved down to transfer a wafer W supported on the said support arm 66 to the carrying arm 54. Then, the carrying arm 54 returns the wafer W supported thereon to the FOUP placed on, for example, the FOUP table 70 a and further takes out another wafer W from the said COUP and carries the wafer W to the load-lock module (LLM) 40 a. Further, in FIG. 9, the wafer W supported on the carrying arm 54 is indicated by a chain line for the convenience of explanation.

Next, a process to be carried out by the purge storage (PST) 60 to process a wafer W will be described. The interior of the purge storage (PST) 60 is evacuated continuously through the-exhaust pipe 68 to maintain the interior thereof at a negative pressure, and the atmosphere flows from the loader module (LM) 50 through the slit-shaped opening 53 of the rear partition wall 57 of the loader module (LM) 50 into the purge storage. On the other hand, when a wafer W is subjected to a plasma etching process, a product produced during the process, such as a silicon halide (for example, silicon bromide) adheres to the wafer. The silicon halide reacts with moisture contained in the atmosphere to produce hydrogen bromide gas. Further, the hydrogen bromide gas reacts with a small amount of ammonia contained in the atmosphere to produce ammonium bromide particles. Then, the hydrogen bromide gas, namely, a corrosive gas, and the ammonium bromide particles are carried away by exhaust currents through the exhaust pipe 68. In addition, the hydrogen bromide gas is removed by a chemical filter, not shown, placed in the exhaust passage.

In the meantime, the above-mentioned sequential carrying operations for carrying the wafer W are determined by taking into consideration the number of the process modules (PM) to be used, processing times respectively needed by the process modules (PM) 30 a to 30 d, and time needed by the posttreatment to be carried out by the purge storage (PST) 60, which has already been described. Suppose that the four process modules (PM) 30 a to 30 d are used in a parallel operating mode for etching and the wafer is held in each process module (PM) for a stay time t1 in this example. Then, time needed by the said posttreatment is expected to be (¾)t1. Thus, time that can be allotted for carrying a processed wafer W to either of the load-lock modules (LLM) 40 a aid 40 b is (¼)t1. Therefore, the four support arms 66 are used; the three support arms 66 are used to enable each wafer W to stay in the purge storage (PST) for (¾)t1, and the one support arm 66 is used as a buffer. The processing time mentioned herein is only an example for typical explanation.

Further, the sequential carrying operations may give priority to carrying a wafer to and from the load-lock modules (LLM) 40 a and 40 b over carrying out a wafer W processed by the posttreatment from the purge storage (PST) 60. For example, even if the wafer W processed by the posttreatment is held in the purge storage (PST) 60 after the wafer W has been transferred from the load-lock module (LLM) 40 to the purge storage (PST) 60, another wafer W may first be carried from a FOUP placed on the FOUP table 70 a to the empty load-lock module (LLM) 40 a and then, the processed wafer W may be returned from the purge storage (PST) 60 to the FOUP placed on the FOUP table 70 a.

Moreover, although either of the load-lock modules 40 a and 40 b may be used both for receiving a wafer W to be processed and for sending out a processed wafer W, one of the load-lock modules 40 a and 40 b may be used exclusively for receiving a wafer W to be processed and the other may be used exclusively for sending out a processed wafer W.

The foregoing embodiment exposes a wafer W processed by the plasma etching process to the atmospheric atmosphere in the purge storage (PST) 60 adjoining the load-lock module (LLM) 40 a or 40 b to produce the corrosive gas by making the products produced during the etching process react with moisture contained in the atmosphere, dissipates the corrosive gas, and then carries the said wafer to the loader module (LM) 50. Consequently, the production of particles through the reaction of the said products on the wafer W with moisture can be suppressed, corrosion of the interior of the loader module (LM) 50, namely, the interior of the atmospheric carrying chamber (the walls of the atmospheric carrying chamber and the carrying mechanism) can be suppressed, adhesion of particles to the component members can be suppressed, and contamination of the wafer with the particles can be reduced.

In addition, a wafer W is carried to and out of the purge storage (PST) 60 by the carrying arm 54 in the loader module (LM) 50, defining the atmospheric carrying chamber. Therefore, any additional carrying system that possibly becomes necessary when the purge storages (PST) 60 are disposed respectively contiguously with the load-lock modules (LLM) 40 a and 40 b is not necessary. Further, since the purge storage (PST) 60 is disposed between the load-lock modules (LLM) 40 a and 40 b, a wafer W can be carried to and out of either of the load-lock modules (LLM) 40 a and 40 b after the wafer W has been carried to and our of the purges storage (PST) 60, the wafer can be processed at a high throughput and built in compact construction.

Moreover, the substrate holding device 63 installed in the purge storage (PST) 60 is vertically movable and hence, a height necessary for transferring the wafer W by the carrying arm 54 between the support arm 66 of the substrate holding device 63 and the loader module 50 is limited, i.e., the carrying arm 54 does not need to be moved vertically. Therefore, the opening 53 formed in the rear partition wall 57 of the loader module 50 may have the shape of a slit having a small area as shown in FIG. 2. Consequently, the leakage of the corrosive gas from the interior of the purge storage (PST) 60 into the loader module (LM) 50 can be suppressed.

In addition, each of the gate valves G7 and G8 combined respectively with the walls of the load-lock modules 40 a and 40 b has the valve element 80 (90) of inflectional shape (chevron shape or curved shape) shown in FIG. 4 or FIG. 6. Therefore, the carrying arm 54 can carry a processed wafer W from the load-lock module 40 a and 40 b directly to the purge storage (PST) by transversely moving the carrying arm 54 to the purge storage (PST) as shown in FIG. 9 instead of carrying the carrying arm 54 to the loader module (LM) 50. Therefore, the stroke of the carrying arm 54 may be short, the carrying arm 54 can move along a circle of a short radius, the loader module (LM) 50 may be small and the system can be built in compact construction.

Further, the load-lock modules 40 a and 40 b may be provided with carrying arms, processed wafers W may be carried from the load-lock modules 40 a and 40 b to the substrate holding device 63 of the purge storage 60 and wafers W to be processed supported on the support arms 66 of the substrate holding device 63 may be carried to the load-lock modules 40 a and 40 b by the carrying arms of the load-lock modules 40 a and 40 b.

Furthermore, in the above embodiment, the purge storage 60 is disposed between the load-lock modules 40 a and 40 b. In addition, purge storages 60 may be joined to the left sidewall of the load-lock module 40 a and the right sidewall of the load-lock module 40 b, respectively, as shown in FIG. 10. Also in this case, a gate valve G7 (G8) disposed between the purge storage 60 and the load-lock module 40 a (40 b) has a curved valve element, a processed wafer W placed on the wafer stage 41 a (41 b) of the load-lock module 40 a (40 b) is transferred to the substrate holding device 63 disposed in the purge storage 60 by picking up the processed wafer W at the carrying arm 54 of a loader module 50 and transversely moving the carrying arm 54. Such a structure has the same effects as the first embodiment. A purge storage 60 may be connected only to either of the left sidewall of the load-lock module 40 a and the right sidewall of the load-lock module 40 b in the present invention. In this case, the load-lock module 40 a (40 b) connected to the purge storage 60 is used exclusively for sending out the processed wafer W. Further, in the system shown in FIG. 10, both the load-lock modules 40 a and 40 b may be provided with carrying arms, and the carrying arms may carry the processed wafer W from the load-lock module 40 a (40 b) to the purge storage 60.

BRIEF DESCRIPTION OF THE DRAWINGS

[FIG. 1] A plan view of a substrate processing system in an embodiment according to the present invention.

[FIG. 2] A perspective view of an important part of the substrate processing system in the embodiment according to the present invention.

[FIG. 3] A schematic sectional view of a purge storage.

[FIG. 4] A schematic perspective view of a gate valve interposed between a load-lock module and the purge storage.

[FIG. 5] Schematic views illustrating operations of the gate valve shown in FIG. 4.

[FIG. 6] A schematic perspective view of another gate valve disposed between the load-lock module and the purge storage.

[FIG. 7] Schematic views illustrating operations of the gate valve shown in FIG. 6.

[FIG. 8] Schematic views illustrating operations of a carrying arm included in a loader module.

[FIG. 9] Schematic views illustrating operations of the carrying arm included in the loader module.

[FIG. 10] A schematic plan view of a substrate processing system in another embodiment according to the present invention.

[FIG. 11] A schematic plan view of a known substrate processing system.

DESCRIPTION OF NUMERICAL SYMBOLS

 2 Substrate processing system 20 Transfer module 21 Carrying arm unit 30a to 30d Process module 40a, 40b Load-lock module 50 Loader module 51 Carrying arm mechanism 60 Purge storage 70a to 70c FOUP table 71 Orienter 

1. A substrate processing system comprising: a carrier table for supporting thereon a substrate carrier containing a plurality of substrates; a vacuum processing chamber in which said substrate is processed in a vacuum atmosphere; a load-lock chamber, through which the substrate is sent out to and received from the vacuum processing chamber, capable of being selectively set in either of a vacuum atmosphere and a normal-pressure atmosphere; a posttreatment chamber adjoining the load-lock chamber to post-process in an atmospheric atmosphere the processed substrate processed by a vacuum process to remove products produced on the substrate by the process; and an atmospheric carrying chamber interposed between said load-lock chamber and said carrier table and provided with a carrying means for carrying a substrate in an atmospheric atmosphere.
 2. The substrate processing system according to claim 1, wherein a substrate is carried into and out of said posttreatment chamber by the carrying means installed in said atmospheric carrying chamber.
 3. The substrate processing system according to claim 1 or 2, wherein said posttreatment chamber and the atmospheric carrying chamber are separated from each other by a partition wall, and the partition wall is provided with an opening having the shape of a slit through which said carrying means and a substrate can pass.
 4. The substrate processing system according to any one of claims 1 to 3, wherein a gate valve disposed between said atmospheric carrying chamber and the load-lock chamber serves also as a gate valve between the load-lock chamber and the posttreatment chamber.
 5. The substrate processing system according to claim 4, wherein said load-lock chamber is provided with a gateway bent with respect to a longitudinal direction, and said gate valve has a valve element bent so as to conform to the gateway.
 6. The substrate processing system according to any one of claims 1 to 5, wherein said load-lock chamber includes a first load-lock chamber and a second load-lock chamber disposed symmetrically with respect to a longitudinal direction behind the atmospheric carrying chamber, and said posttreatment chamber is disposed between said first and second load-lock chambers.
 7. The substrate processing system according to any one of claims 1 to 6, wherein the posttreatment chamber is provided with a holding unit capable of holding substrates in a plurality of layers.
 8. The substrate processing system according to claim 7, wherein the holding unit can be vertically moved by a lifting means.
 9. The substrate processing system according to any one of claims 1 to 8, wherein the posttreatment chamber is used for promoting the reaction of products formed on a substrate while the substrate is being processed with moisture contained in the atmosphere.
 10. A substrate processing method comprising the steps of: processing a substrate in a vacuum processing chamber; carrying the processed substrate from said vacuum processing chamber to a load-lock chamber; changing a vacuum atmosphere in the load-lock chamber for a normal-pressure atmosphere; subsequently carrying said substrate from said load-lock chamber to a posttreatment chamber adjoining said load-lock chamber; processing said substrate by a posttreatment in an atmospheric atmosphere to remove products produced by a vacuum process in said posttreatment chamber; and carrying the substrate from the posttreatment chamber to an atmospheric carrying chamber disposed between a carrier table on which a carrying container containing a plurality of substrates is placed and said load-lock chamber, and provided with a carrying means for carrying the substrate in an atmospheric atmosphere.
 11. The substrate processing method according to claim 10, wherein the carrying means of said atmospheric carrying chamber carries a wafer to and from said posttreatment chamber.
 12. The substrate processing method according to claim 10 or 11, wherein a substrate is carried between said posttreatment chamber and the atmospheric carrying chamber through an opening having the shape of a slit formed in a partition wall.
 13. The substrate processing method according to any one of claims 10 to 12, wherein a gate valve disposed between said atmospheric carrying chamber and the load-lock chamber serves also as a gate valve between the load-lock chamber and the posttreatment chamber.
 14. A storage medium storing a computer program to be executed by a substrate processing system for processing a substrate in a vacuum atmosphere; wherein said program specifies the steps of the substrate processing method according to any one of claims 10 to
 13. 